<?xml version="1.0" encoding="UTF-8"?><xml><records><record><source-app name="Biblio" version="6.x">Drupal-Biblio</source-app><ref-type>17</ref-type><contributors><authors><author><style face="normal" font="default" size="100%">Medvedev, V. V.</style></author><author><style face="normal" font="default" size="100%">Yakshin, A. E.</style></author><author><style face="normal" font="default" size="100%">van de Kruijs, R. W. E.</style></author><author><style face="normal" font="default" size="100%">Krivtsun, V. M.</style></author><author><style face="normal" font="default" size="100%">Yakunin, A. M.</style></author><author><style face="normal" font="default" size="100%">Koshelev, K. N.</style></author><author><style face="normal" font="default" size="100%">Bijkerk, F.</style></author></authors></contributors><titles><title><style face="normal" font="default" size="100%">Infrared antireflective filtering for extreme ultraviolet multilayer Bragg reflectors</style></title><secondary-title><style face="normal" font="default" size="100%">Optics Letters</style></secondary-title><alt-title><style face="normal" font="default" size="100%">Opt. Lett.</style></alt-title></titles><keywords><keyword><style  face="normal" font="default" size="100%">CONSTANTS</style></keyword><keyword><style  face="normal" font="default" size="100%">mirrors</style></keyword></keywords><dates><year><style  face="normal" font="default" size="100%">2012</style></year><pub-dates><date><style  face="normal" font="default" size="100%">Apr</style></date></pub-dates></dates><urls><web-urls><url><style face="normal" font="default" size="100%">&lt;Go to ISI&gt;://WOS:000302768300012 </style></url></web-urls></urls><number><style face="normal" font="default" size="100%">7</style></number><volume><style face="normal" font="default" size="100%">37</style></volume><pages><style face="normal" font="default" size="100%">1169-1171</style></pages><isbn><style face="normal" font="default" size="100%">0146-9592</style></isbn><language><style face="normal" font="default" size="100%">English</style></language><abstract><style face="normal" font="default" size="100%">An extreme ultraviolet multilayer mirror with an integrated spectral filter for the IR range is presented and experimentally evaluated. The system consists of an IR-transparent B4C/Si multilayer stack which is used both as EUV-reflective coating and as a phase shift layer of the resonant IR antireflective (AR) coating. The AR coating is optimized in our particular case to suppress CO2 laser radiation at a wavelength of 10.6 mu m, and a suppression of more than two orders of magnitude is demonstrated. The method allows high suppression over a large angular acceptance range, relevant for application in lithography systems. (C) 2012 Optical Society of America</style></abstract><work-type><style face="normal" font="default" size="100%">Article</style></work-type><accession-num><style face="normal" font="default" size="100%">WOS:000302768300012</style></accession-num><notes><style face="normal" font="default" size="100%">ISI Document Delivery No.: 925NPTimes Cited: 0Cited Reference Count: 19</style></notes><custom1><style face="normal" font="default" size="100%">nSI</style></custom1><auth-address><style face="normal" font="default" size="100%">[Medvedev, V. V.; Yakshin, A. E.; van de Kruijs, R. W. E.; Bijkerk, F.] FOM Inst DIFFER, NL-3430 BE Nieuwegein, Netherlands. [Krivtsun, V. M.; Koshelev, K. N.] Inst Spect RAS, Troitsk 142190, Moscow Region, Russia. [Yakunin, A. M.] ASML, NL-5504 DR Veldhoven, Netherlands. [Bijkerk, F.] Univ Twente, MESA Inst Nanotechnol, NL-7500 AE Enschede, Netherlands.Medvedev, VV (reprint author), FOM Inst DIFFER, POB 1207, NL-3430 BE Nieuwegein, NetherlandsV.V.Medvedev@differ.nl</style></auth-address></record></records></xml>