Filters: Auteur is Harmsen, R. [Clear All Filters]
In situ ellipsometry study of atomic hydrogen etching of extreme ultraviolet induced carbon layers. Applied Surface Science. 258:7-12.. 2011.
Secondary electron yield measurements of carbon covered multilayer optics. Applied Surface Science. 257:354-361.. 2010.
Carbon-induced extreme ultraviolet reflectance loss characterized using visible-light ellipsometry. Measurement Science & Technology. 22:8.. 2011.