Filters: Auteur is van den Boogaard, A. J. R. [Clear All Filters]
Characterization of Mo/Si multilayer growth on stepped topographies. Journal of Vacuum Science & Technology B. 29:6.. 2011.
Influence of noble gas ion polishing species on extreme ultraviolet mirrors. Journal of Applied Physics. 112. 2012.
Ion-enhanced growth in planar and structured Mo/Si multilayers. PhD thesis at the University of Twente, 13 December 2011.. 2011.
Surface morphology of Kr+-polished amorphous Si layers. Journal of Vacuum Science & Technology A. 28:552-558.. 2010.
Wavelength separation from extreme ultraviolet mirrors using phaseshift reflection. Optics Letters. 37:160-162.. 2012.