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Filters: Auteur is van den Boogaard, A. J. R. [Clear All Filters]

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C

van den Boogaard AJR, Louis E, Zoethout E, Goldberg KA, Bijkerk F. 2011. Characterization of Mo/Si multilayer growth on stepped topographies. Journal of Vacuum Science & Technology B. 29:6. Abstract

I

van den Boogaard AJR, Zoethout E, Makhotkin IA, Louis E, Bijkerk F. 2012. Influence of noble gas ion polishing species on extreme ultraviolet mirrors. Journal of Applied Physics. 112 Abstract

van den Boogaard AJR. 2011. Ion-enhanced growth in planar and structured Mo/Si multilayers. PhD thesis at the University of Twente, 13 December 2011.

S

van den Boogaard AJR, Louis E, Zoethout E, Mullender S, Bijkerk F. 2010. Surface morphology of Kr+-polished amorphous Si layers. Journal of Vacuum Science & Technology A. 28:552-558. Abstract

W

van den Boogaard AJR, van Goor FA, Louis E, Bijkerk F. 2012. Wavelength separation from extreme ultraviolet mirrors using phaseshift reflection. Optics Letters. 37:160-162. Abstract