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2010

Chen JQ, Louis E, Verhoeven J, Harmsen R, Lee CJ, Lubomska M, van Kampen M, van Schaik W, Bijkerk F. 2010. Secondary electron yield measurements of carbon covered multilayer optics. Applied Surface Science. 257:354-361. Abstract

2009

Chen JQ, Louis E, Lee CJ, Wormeester H, Kunze R, Schmidt H, Schneider D, Moors R, van Schaik W, Lubomska M et al.. 2009. Detection and characterization of carbon contamination on EUV multilayer mirrors. Optics Express. 17:16969-16979. Abstract