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Chen JQ, Louis E, Lee CJ, Wormeester H, Kunze R, Schmidt H, Schneider D, Moors R, van Schaik W, Lubomska M et al.. 2009. Detection and characterization of carbon contamination on EUV multilayer mirrors. Optics Express. 17:16969-16979. Abstract

Chen JQ, Lee CJ, Louis E, Bijkerk F, Kunze R, Schmidt H, Schneider D, Moors R. 2009. Characterization of EUV induced carbon films using laser-generated surface acoustic waves. :768-771. Abstract

M

Mertens B, Weiss M, Meiling H, Klein R, Louis E, Kurt R, Wedowski M, Trenkler H, Wolschrijn B, Jansen R et al.. 2004. Progress in EUV optics lifetime expectations. Microelectronic Engineering. 73-74:16-22. Abstract